Dimensions: 7.1in x 10.4in x 9.8in
(180mm x 265mm x 250mm)
Weight: 8.81 lbs (4 kg)
Travel in Z Direction 90mm (max)
Resolution in Z Direction 5μm
XY Stage Double Layer Mechanical Stage
XY Stage Size 180mm x150mm (X x Y)
Travel in X/Y Direction 16mm (+/- 8mm from the center)
Resolution in X/Y 10μm